摘要
阐述应用压光电传感器的逆压电效应和光电传感器来测量工件的表面粗糙度。在压电传感器组上被输入一定的电压时,压电传感器组驱动测量装置上的反射镜产生偏转,将激光源的激光束反射到加工工件的表面进行光学扫描。当激光束经过工件表面反射到光电传感器时,光电传感器将按照工件表面反射情况,产生相应的光电流。当光电传感器上的光电流强度发生突变时,会产生一个电脉冲。将这些脉冲数据输入计算机,通过计算就可测量出被测量工件的表面粗糙度。
The article showed how to use contrary piezoelectricity effect of piezoelectricity sensor and photoelectric sensor to measure roughness of product. When import regular voltage on piezoelectricity sensors and piezoelectricity sensors can drive the reflector of measure device to deflect regular angle. And the laser beams from the laser source reflector reached the product surface and scanning the product＇s surface, and it are reflected to photoelectric sensor. Photoelectric sensor will produce photoelectric electric current proportional to the case of the product＇s surface. When the photoelectric electric current changes, it will output a plus. If this plus data imported to computer, the roughness of product will be measured.
出处
《机械研究与应用》
2006年第5期10-11,共2页
Mechanical Research & Application
关键词
粗糙度
可逆压电效应
压电晶体
扫描电压
roughness
contrary piezoelectricity effect
piezoelectric crystal
scanning voltage
