摘要
针对传统电感传感器及其测量系统难于同时满足测量精度和采样速度的现状,提出一种适合动态位移超精测量方法.采用半桥式电感传感器作测量探头,利用集成信号调理电路和Δ-Σ型AD转换器,将高速过采样和平均滤波有机融和,实现了动态微位移的精密测量.实验结果表明,该方法在保障100Hz速度的前提下,测量稳定性优于±0.01μm.
Aimed at the existing circumstances that traditional indnctive displacement sensors and its measuring systems can not satisfy requirements both in precision and in sampling frequency, the paper introduces a measuring method for high-precision dynamic displacement measuring. Using half-bridge inductive sensors as probes, basing on integrated signal-processing circuit and Δ-∑ Analog-to-Digital converter, the system combined high-speed over-sampling method with average-filtering method to fulfill the precision measurement of dynamic micron-displacement. Experimental data proves that stability performances better than ±0.01μm when speed is limited under 100Hz.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第6期2428-2431,共4页
Chinese Journal of Sensors and Actuators
关键词
电感传感器
动态位移
深亚微米
过采样
平均滤波
inductive sensor
dynamic displacement
deep-submicron
over-sample
average filtering
